This research project is aimed at implementing novel technology for processing and characterization of graphenebased nanostructures at the Institute of Physics, University of Tartu. Graphene – a carbon phase discovered only five years ago – is a monolayer of hexagonally bonded carbon atoms, which has very high intrinsic carrier mobility at room temperature. Mainly for this reason, graphene has a potential to replace conventional semiconductor materials such as silicon in the future nanoelectronics. In this project, problems related to application of graphene in nanoelectronics and sensorics will be investigated. In experiments, graphene samples, produced by micromechanical cleaving of graphite will be used and the deformation of graphene in multilayer structures will be studied. The information to be obtained is important for understanding the changes in electronic properties of graphene appearing after its coating with different highpermittivity dielectric layers when preparing graphenebased nanoelectronic devices. At the same time, possibilities for synthesis of large-area graphene sheets will be explored. Chemical vapor deposition and atomic layer deposition methods will be applied to realize this objective. The goal is to prepare graphene sheets with the size and quality suitable for device applications, in particular, for development of highly sensitive chemical sensors based on graphene. The project also allows the materials scientists of the Institute of Physics to enter smoothly the very competitive field of graphene studies and join the international network of research groups working in this area.